NAOC Open IR
Design an Asymmetrical Three-Beam Laser Interference Lithography for Fabricating Micro- and Nano-Structures
Dong, Litong1,2,3; Zhang, Ziang4; Wang, Zuobin1,2,3; Li, Dayou2,3; Liu, Mengnan1
2020-09-01
Source PublicationJOURNAL OF LASER MICRO NANOENGINEERING
ISSN1880-0688
Volume15Issue:2Pages:85-91
AbstractMulti-beam laser interference lithography (LIL) has become one of the most important techniques and shown significant advantages in the fabrication of micro- and nano-structures. Controlling intensity ratio of optical distributions is a key issue in LIL for fabricating micro- and nano-structures. This paper presents an asymmetrical three-beam LIL system which effectively improves the intensity ratio of optical distributions. Comparing with the symmetrical three-beam interference, the asymmetrical three-beam LIL achieved the high intensity ratio of optical distribution when producing the similar interference pattern. In addition, this system also avoids modulation patterns in multi-beam LIL systems and reduces the difficulty of actual LIL processing. A fast Fourier Transform (FFT) analysis used to study the pattern distributions of the asymmetrical three-beam interference from frequency spectra which shows that the pattern with a high-intensity array can be obtained by adjusting the parameter settings of incident laser beams. The asymmetrical three-beam LIL system was verified through fabricating patterns. The experimental results are in good agreement with the theoretical analyses.
Keywordlaser interference lithography polarization azimuth angle fast Fourier Transform
Funding OrganizationEU H2020 Program ; EU H2020 Program ; National Natural Science Foundation of China ; National Natural Science Foundation of China ; Jilin Provincial Science and Technology Program ; Jilin Provincial Science and Technology Program ; "111" Project of China ; "111" Project of China ; EU H2020 Program ; EU H2020 Program ; National Natural Science Foundation of China ; National Natural Science Foundation of China ; Jilin Provincial Science and Technology Program ; Jilin Provincial Science and Technology Program ; "111" Project of China ; "111" Project of China ; EU H2020 Program ; EU H2020 Program ; National Natural Science Foundation of China ; National Natural Science Foundation of China ; Jilin Provincial Science and Technology Program ; Jilin Provincial Science and Technology Program ; "111" Project of China ; "111" Project of China ; EU H2020 Program ; EU H2020 Program ; National Natural Science Foundation of China ; National Natural Science Foundation of China ; Jilin Provincial Science and Technology Program ; Jilin Provincial Science and Technology Program ; "111" Project of China ; "111" Project of China
DOI10.2961/jlmn.2020.02.2002
WOS KeywordSILICON ; PROPERTY
Language英语
Funding ProjectEU H2020 Program[767285] ; National Natural Science Foundation of China[11504030] ; National Natural Science Foundation of China[11673082] ; National Natural Science Foundation of China[11103047] ; Jilin Provincial Science and Technology Program[20190702002GH] ; "111" Project of China[D17017]
Funding OrganizationEU H2020 Program ; EU H2020 Program ; National Natural Science Foundation of China ; National Natural Science Foundation of China ; Jilin Provincial Science and Technology Program ; Jilin Provincial Science and Technology Program ; "111" Project of China ; "111" Project of China ; EU H2020 Program ; EU H2020 Program ; National Natural Science Foundation of China ; National Natural Science Foundation of China ; Jilin Provincial Science and Technology Program ; Jilin Provincial Science and Technology Program ; "111" Project of China ; "111" Project of China ; EU H2020 Program ; EU H2020 Program ; National Natural Science Foundation of China ; National Natural Science Foundation of China ; Jilin Provincial Science and Technology Program ; Jilin Provincial Science and Technology Program ; "111" Project of China ; "111" Project of China ; EU H2020 Program ; EU H2020 Program ; National Natural Science Foundation of China ; National Natural Science Foundation of China ; Jilin Provincial Science and Technology Program ; Jilin Provincial Science and Technology Program ; "111" Project of China ; "111" Project of China
WOS Research AreaScience & Technology - Other Topics ; Materials Science ; Optics ; Physics
WOS SubjectNanoscience & Nanotechnology ; Materials Science, Multidisciplinary ; Optics ; Physics, Applied
WOS IDWOS:000594086300003
PublisherJAPAN LASER PROCESSING SOC
Citation statistics
Document Type期刊论文
Identifierhttp://ir.bao.ac.cn/handle/114a11/80086
Collection中国科学院国家天文台
Corresponding AuthorWang, Zuobin; Li, Dayou
Affiliation1.Changchun Univ Sci & Technol, Int Res Ctr Nano Handling & Mfg China, Changchun 130022, Peoples R China
2.Univ Bedfordshire, IRAC, Luton LU1 3JU, Beds, England
3.Univ Bedfordshire, JR3CN, Luton LU1 3JU, Beds, England
4.Chinese Acad Sci, Changchun Observ, Natl Astron Observ, Changchun 130117, Peoples R China
Recommended Citation
GB/T 7714
Dong, Litong,Zhang, Ziang,Wang, Zuobin,et al. Design an Asymmetrical Three-Beam Laser Interference Lithography for Fabricating Micro- and Nano-Structures[J]. JOURNAL OF LASER MICRO NANOENGINEERING,2020,15(2):85-91.
APA Dong, Litong,Zhang, Ziang,Wang, Zuobin,Li, Dayou,&Liu, Mengnan.(2020).Design an Asymmetrical Three-Beam Laser Interference Lithography for Fabricating Micro- and Nano-Structures.JOURNAL OF LASER MICRO NANOENGINEERING,15(2),85-91.
MLA Dong, Litong,et al."Design an Asymmetrical Three-Beam Laser Interference Lithography for Fabricating Micro- and Nano-Structures".JOURNAL OF LASER MICRO NANOENGINEERING 15.2(2020):85-91.
Files in This Item:
There are no files associated with this item.
Related Services
Recommend this item
Bookmark
Usage statistics
Export to Endnote
Google Scholar
Similar articles in Google Scholar
[Dong, Litong]'s Articles
[Zhang, Ziang]'s Articles
[Wang, Zuobin]'s Articles
Baidu academic
Similar articles in Baidu academic
[Dong, Litong]'s Articles
[Zhang, Ziang]'s Articles
[Wang, Zuobin]'s Articles
Bing Scholar
Similar articles in Bing Scholar
[Dong, Litong]'s Articles
[Zhang, Ziang]'s Articles
[Wang, Zuobin]'s Articles
Terms of Use
No data!
Social Bookmark/Share
All comments (0)
No comment.
 

Items in the repository are protected by copyright, with all rights reserved, unless otherwise indicated.