NAOC Open IR
基于激光扫描法的非接触式光学元件曲率半径测量系统
覃瑛; 许骏
2016
Source Publication激光与光电子学进展
ISSN1006-4125
Volume053Issue:009Pages:091203_01
Abstract介绍了基于激光扫描法的非接触式光学元件曲率半径检测系统,该系统大大提高了光学元件粗磨后曲率半径检测的自动化程度,实现了软硬件结合的一键式面形数据获取。该系统利用x/y轴二维平移台的运动实现网格扫描,同时基于激光扫描法测量面形弧高,并附加有z轴升降台扩展弧高量程。设计了上位机控制程序和人机交互界面,使系统在后期使用中更为灵活便捷。编写了曲面拟合算法,最终实现光学元件面形数据的自动采集、拟合以及相关光学参数的计算,可完成对多种光学元件面形的非接触式检测。实验结果表明,无论待测光学元件的表面落差是否超出激光头测量范围,系统均能完整采集所需面形数据,经过误差处理后,测量精度优于±0.15%,满足粗磨检测要求。
Language英语
Document Type期刊论文
Identifierhttp://ir.bao.ac.cn/handle/114a11/46532
Collection中国科学院国家天文台
Affiliation中国科学院国家天文台
First Author AffilicationNational Astronomical Observatories, Chinese Academy of Sciences
Recommended Citation
GB/T 7714
覃瑛,许骏. 基于激光扫描法的非接触式光学元件曲率半径测量系统[J]. 激光与光电子学进展,2016,053(009):091203_01.
APA 覃瑛,&许骏.(2016).基于激光扫描法的非接触式光学元件曲率半径测量系统.激光与光电子学进展,053(009),091203_01.
MLA 覃瑛,et al."基于激光扫描法的非接触式光学元件曲率半径测量系统".激光与光电子学进展 053.009(2016):091203_01.
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