NAOC Open IR
凸二次曲面的工艺球面补偿检测
陈泽1; 胡明勇2; 赵奇2; 范二荣2
2016
Source Publication光电工程
ISSN1003-501X
Volume043Issue:009Pages:56
Abstract在非球面的检测中,工艺球面补偿检测是最普遍的方法。针对该方法适用范围的局限性,本文提出了应用工艺球面补偿检测时非球面所必须满足的条件。根据波像差理论和瑞利判据,推导出凸二次曲面能够应用工艺球面补偿检测所必须满足的条件,并采用有限距离正面补偿检测的方法,对工艺球面补偿检测的局限性提出了改进。最终结果表明本文所提出的理论能够判定,所需要研制的凸双曲面镜不能直接应用工艺球面补偿检测,而组合补偿检测方法能够保证凸双曲面的面形精度δPV=0.1598λ优于λ/6(λ=632.8 nm),满足技术指标。
Language英语
Document Type期刊论文
Identifierhttp://ir.bao.ac.cn/handle/114a11/41920
Collection中国科学院国家天文台
Affiliation1.中国科学院国家天文台
2.合肥工业大学
First Author AffilicationNational Astronomical Observatories, Chinese Academy of Sciences
Recommended Citation
GB/T 7714
陈泽,胡明勇,赵奇,等. 凸二次曲面的工艺球面补偿检测[J]. 光电工程,2016,043(009):56.
APA 陈泽,胡明勇,赵奇,&范二荣.(2016).凸二次曲面的工艺球面补偿检测.光电工程,043(009),56.
MLA 陈泽,et al."凸二次曲面的工艺球面补偿检测".光电工程 043.009(2016):56.
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