NAOC Open IR
两非球面反射镜非扫描式软X射线投影光刻系统
潘君骅; 朱永田
1997
Source Publication光学学报
ISSN0253-2239
Volume017Issue:012Pages:1756
Abstract提出了一个软X射线投影光刻,缩比为6:1,由两非球面镜构成的光学系统。该系统在波长为13nm时,可获得Φ30mm的平像场和优于0.1μm的光刻线条分辨率,其最大畸变为0.4%。
Language英语
Document Type期刊论文
Identifierhttp://ir.bao.ac.cn/handle/114a11/41541
Collection中国科学院国家天文台
Affiliation中国科学院国家天文台
First Author AffilicationNational Astronomical Observatories, Chinese Academy of Sciences
Recommended Citation
GB/T 7714
潘君骅,朱永田. 两非球面反射镜非扫描式软X射线投影光刻系统[J]. 光学学报,1997,017(012):1756.
APA 潘君骅,&朱永田.(1997).两非球面反射镜非扫描式软X射线投影光刻系统.光学学报,017(012),1756.
MLA 潘君骅,et al."两非球面反射镜非扫描式软X射线投影光刻系统".光学学报 017.012(1997):1756.
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